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Comparison of Various X-ray Spectrometers
- Practical Electron Microscopy and Database -
- An Online Book -
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Table 2527. Comparison of various X-ray spectrometers.
Model |
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Bolometer |
Characteristics |
Energy dispersive |
Crystal diffraction |
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Major advantages |
More sensitive to high-energy x-rays than SDD detector |
Extremely high-count rates with good resolution and peak stability |
High energy X rays such as gold Kα (69 keV) |
High energy resolution |
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Disadvantages |
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K-shell absorption edge at 11.1 keV; Complex L-shell absorption edge structure starting at 1.4 keV; A series of escape peaks in the range 2-12 keV
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Slow data acquisition due to smaller solid angle than that in EDS |
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Sum peaks Si K peak |
Sum peaks Si K peak; less sensitive to high-energy x-rays than Si(Li) detector |
Sum peaks Ge K/L peaks |
High-order lines |
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FWHM energy resolution (eV) |
Energy dependent |
Crystal dependent: 5 - 10 |
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128 - 150: degrades substantially with increased input count rate due to slow response of diode geometry |
125 - 155: degrades slowly with increasing count rate due to fast response of radial field geometry; decreasing the device temperature makes the resolution better |
114 - 135 |
5 - 10 |
Typical output rates (Kcps) |
Medium: 5 – 20 |
1000 to >100 kcps per channel |
5 – 10 |
50 |
1 |
Sensitivity |
0.1-1%
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0.01 - 0.1% |
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Good sensitivity from ~70 eV (Be-K) to ~20 keV; reduced sensitivity until 50 keV |
Good sensitivity up to 10 keV; reduced sensitivity until 20 keV |
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Quantum efficiency
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~100% for 2-16 keV |
Variable, <30% |
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Elements detected |
Z ≥ 11 (Na) for Be window;
Z ≥ 6 (C) for windowless |
Z ≥ 5 (B) |
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Typical time to collect full spectrum |
~ 1 min |
0.25 μs ~ few secs |
~ 1 min |
~ 30 min to hours
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~ 30 |
Pixel dwell times |
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≥ A few μs |
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Energy to form electron-hole pairs at 77 K (eV) |
3.8 |
3.8 |
2.9 |
N.A. |
N.A. |
Indirect band gap energy (eV) |
1.1 |
1.1 |
0.67 |
N.A. |
N.A. |
Operating Temperature |
Extreme cooling required to reduce electronic noise (77~130 K): LN2, thermoelectric, or Peltier+water or refrigeration |
230~250 K: Peltier cooling, thermoelectric, or no cooling (most have convective cooling, some have fans (vibration)) |
LN2 or thermoelectric |
None |
100 mK |
Detector active area (mm2) |
4 to >50 |
≥ 50 to 120 [1] |
10 to >50 |
N.A. |
1 |
Collection angle (sr) |
0.03 – 0.3 |
0.3 |
0.03 – 0.2 |
10–4–10–3 |
10–4–10–3 |
Take-off angle (°) |
0, 20, 72 |
20 |
0, 20, 72 |
40 – 60 |
40 – 60 |
Sensor thickness |
E.g. 3 mm |
0.5 mm |
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Availability of detector arrays |
No |
Yes |
No |
No |
Yes |
Electric Field & electron Path |
Axial field |
Radial field |
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Electrical contact |
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Small |
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Total noise |
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Low |
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Dominates at high shaping times |
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Capacitance |
High: The total capacitance in Si(Li) detectors is much higher than that in SDD detectors. |
Low: The total capacitance in SDD detector is much lower than that in Si(Li) detector. |
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Leakage current |
The leakage current in Si(Li) detectors is much lower than that in SDD detectors. |
The leakage current in SDD detectors is much higher than that in Si(Li) detectors. |
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Fabrication Technology |
Discrete components |
Semiconductor; Size and shape limited only by fabrication technology |
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Application frequency |
Less frequent |
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Less frequent |
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[1] H.S. von Harrach, P. Dona, B. Freitag, H. Soltau, A. Niculae, M. Rohde, An integrated Silicon Drift Detector System for FEI Schottky Field
Emission Transmission Electron Microscopes, Microsc Microanal 15(Suppl 2), 2009 (208).
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