Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| The primary quality of electron optical elements (electromagnetic lenses) in electron microscopes (EMs) is usually degraded by secondary effects. They are aberrations, which can be categorized by three groups: geometric, chromatic, and parasitic aberrations, such as spherical aberration, diffraction aberration, astigmatism, coma aberration, chromatic aberration, and higher-order aberrations. All such defects will perturb the focusing properties of the corresponding lenses.
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