Electron Bean Scanning
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

 

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A deflector for electron-beam deflection in EMs has been applied to align, tilt, shift, scan the electron beam, and so on. The deflector, usually including a pair of deflection coils, is called the double-deflection system.

The principle of beam scanning in SEM and STEM systems is similar to the electron beam scanning of old TV system as shown in Figure 4955a.

Scanning of Electron Beam

Figure 4955a. Electron beam scanning of old TV system.

Figure 4955b shows the schematic diagram of an SEM system. The beam-scan generator and the relevant lenses are indicated as well.

Schematic diagram of an SEM system with a thermionic electron gun

Figure 4955b. Schematic diagram of an SEM system with a thermionic electron gun.

 

 

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The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.