Applications of TEM-related Techniques

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Applications of TEM-related Techniques

The techniques related to TEM systems can be divided into two categories:
i) Diffraction based techniques such as convergent-beam-electron-diffraction (CBED) and nanobeam electron diffraction (NBD);
ii) Image based techniques such as high-resolution electron microscopy (HREM) and dark-field electron holography (HoloDark).

Table 4311 lists the information which an analytical transmission electron microscope (TEM), equipped with EDS and EELS systems can produce due to a variety of beam-specimen interactions.

Table 4311. Various applications of TEM-related techniques.

Applications	Examples	Others
Applications in field
Life sciences	Cellular structures, organic fibres, life environment
Biological field
Medical field
Forensic analysis
Mechanical field	Plastic deformations, ordered alloy structures	Phase transformations, morphological (structural) analysis
Semi-conductors	Defects from the manufacturing process, layers and structures
Nanotechnology
Materials sciences	Polymeric, metallic, ceramic, composite and nano-structured, nanometric, layers and structures
Metallurgy	Identify flaws, fractures and damages to micro-sized objects
Gemology
Applications of different techniques
Bright Field (BF)/Dark Field (DF)	To p rovide information about size and morphology of particles, and detect crystalline areas, defects, grain boundaries and phases	Transmitted, elastically scattered electrons
High resolution TEM (HRTEM)	Allows lattice fringe imaging, that is directly related to the structure and visualization of defects and interfaces at atomic resolutions
Electron diffraction (structural)	To obtain crystallographic information such as lattice parameters, crystal symmetry and orientation
Analytical Electron Microscopy (AEM) (by adding accessories and techniques)
EDS (chemical)	Qualitative and semi-quantitative elemental analysis of the illuminated area with emitted X-rays
EELS (chemical)	Qualitative and semi-quantitative elemental analysis: analyze the inelastically scattered electrons and thus reveal the information about the bonding between atoms and/or the nearest neighbors	Transmitted electrons
Energy filtered TEM (EFTEM)	To use the inelastically scattered electrons to create elemental and chemical maps	Transmitted electrons
Scanning TEM (STEM)	To image by enabling the formation of a small probe of convergent electron beam and scanning over a defined area in the sample	Transmitted, elastically scattered electrons
High angle annular dark field (HAADF)	To obtain Z-contrast images, by selecting the high-angle incoherently scattered electrons	Transmitted, elastically scattered electrons
AES	To image by using Auger electrons
BSE	To image by using backscattered electrons
SEM	To image by using secondary electrons
Provided information
Topographical information
Morphological information
Compositional information
Crystalline information
Scaling information
Applicable resolution	Provide information from micron sizes down to atomic scale and molecular level
Category
Industry	Help fix problems and/or help to make a more durable, efficient product
Education	Use TEMs for research and studies

Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Applications of TEM-related Techniques