Table of Contents/Index
Chapter/Index:
Introduction
|
A
|
B
|
C
|
D
|
E
|
F
|
G
|
H
|
I
|
J
|
K
|
L
|
M
|
N
|
O
|
P
|
Q
|
R
|
S
|
T
|
U
|
V
|
W
|
X
|
Y
|
Z
|
Appendix
Chapter A
A-centered lattices/A-centering & its space groups
Monoclinic
A2/a (C2/c , 15)
A2/m space group
Orthorhombic
Amm2 (38)
Abm2 (39)
Ama2 (40)
Aba2 (41)
A2
1
am (Cmc2
1
, 36)
A-planes of sapphire crystal
Ab-initio methods used in EELS
Abbe's equation: resolution limit of microscopes
Abma (Cmca, Bmab, 64) space group
Aberration coefficients of electron microscopes
Aberration coefficient C
1,2
/A
1
: two-fold axial astigmatism and its corrections in TEMs
Aberration coefficient C
2,1
(B
2
): axial coma aberration
Shape similarity of aberrations in terms of azimuthal symmetry
Third order aberrations
Spherical aberration
Spot/beam size and shape limited by aberrations
Aberrations with four fold symmetry
Aberrations with two fold symmetry
Aberration in EELS imaging
Off-axis aberrations in EMs
Aberration coefficients reflected in Ronchigram
4-fold parasitic aberrations shown in Ronchigram after aberration correction
Segmental Ronchigram autocorrelation function matrix (SRAM) for aberration correction
Aberration corrections/alignments/correctors
Aberration correction in CTEM
Aberration correction in STEM
Delta-type aberration correctors
Aberration correction for HAADF imaging
Aberration corrections in TEM-EELS system
Advantages of EMs with aberration correctors
Application of aberration corrections
Improvement of spatial resolution using aberration correction in TEM/STEM
Coma aberration correction in EMs
Spherical aberration correction
Fifth-order aberration correction
Comparison between aberration-corrected and uncorrected EMs
Image contrast in aberration-corrected EMs
Position and length of aberration correctors
Manually correctable aberrations
Beam tilt in aberration corrected TEM
Second-order aberration corrections
Reversing sign of aberrations
EELS & EFTEM measurements in aberration corrected TEMs
Operation of aberration correctors
Probe current affected by aberration corrections
Electron-probe intensity distribution depending on aberrations
Zemlin tableaus method
Applicable larger convergence angle in aberration-corrected EMs
Segmental Ronchigram autocorrelation function matrix (SRAM) for aberration correction
Usage of aberration correctors
Correction of electron optical aberrations in EFTEM
EDS measurements in aberration corrected TEMs
Correction of 3
rd
order star aberration (S
3
)
Aberration correction:
Indirect aberration corrections
Aberration correction using off-axis electron holography technique
Aberration correction through-focus series reconstruction
Aberration determinations
Determination of the spherical aberration coefficient
Aberration determinations by image shift due to tilting illumination
Aberration measurement method based on diffractogram
Aberration coefficients determined by defocus-based techniques
Aberration determination by focal sets of Ronchigram
Aberration of ray
Coherent aberrations
Incoherent aberrations in EMs
Aberrations in electromagnetic lenses in EMs
Aberration & beam spread/convergence
Chromatic aberration
Coma aberration in EMs
Focusing properties of electromagnetic lenses affected by aberrations
Geometric aberration
Spherical aberration
Diffraction & aberration
Incoherent aberrations in EMs
Wave aberration function
Aberrations and imaging requirements for small field of view in EMs
Aberration in well-aligned EMs
Aberrations versus working distance in SEMs
Wavefunction affected by aberrations in CTEM
Wavefunction affected by aberrations in STEM
Shape similarity of aberrations in terms of azimuthal symmetry
Aberration dependence of angle of electron rays
Third order aberrations
Parasitic aberrations in multipole corrector optics
Aberrations and imaging requirements for large field of view in EMs
Spatial resolution limit affected by aberrations
Absorption
EELS detection of molecularly adsorbed species on surfaces
Absorption edge energy
Near Edge X-Ray Absorption Fine Structure (NEXAFS)
X-Ray Absorption Near Edge Structure (XANES)
X-ray absorption coefficient of typical materials
Periodic table of X-ray absorption edges
Electron absorption EM specimen (& thickness dependence)
Fraction of absorbed electrons depending on sample thickness
Accelerating voltage/tube in EMs
Spatial resolution improved by increasing accelerating voltage in EMs
Dependence of C
s
and C
c
aberrations on accelerating voltage of beam
Dependence of radiation damage on accelerating voltage of electrons
Dependence of EDS on accelerating voltages of incident electrons
Dependence of EELS/EFTEM on accelerating voltages of incident electrons
SEM spatial resolution affected by accelerating voltage of electron beam
Electron backscattering affected by accelerating voltage
STEM imaging affected by accelerating voltage of electron beam
Backscattered electron imaging affected by accelerating voltage of electron beam
Accelerating voltage dependence of scattering cross-section for ionization
Instability in accelerating voltage of electron beam
Dependence of observable thickness on accelerating voltage in TEM/STEM
Dependence of image contrast on accelerating voltage in TEM/STEM
van de Graaff generators
Properties of accelerated electrons
Accuracies in EM Measurements
Accuracy of EDS quantification
Accuracy of EELS measurement
Accuracy of lattice spacing measurements by HRTEM/FFT/electron diffraction
Accuracy of angle measurement in HRTEM images
Accuracy of CD (critical dimension) measurements using TEM
Improvement of EDS analysis accuracy
Accuracy of CBED patterns
Accuracy of strain measurement by CBED
Accuracies of beam tilt & of alignment of zone axis
ACD (anti-contamination device)
ACD (anti-contamination device) operation on TEM system
Adhesion
Adhesion between gold and other materials
Acronyms/abbreviations used in microscopy and materials
Active voltage contrast (AVC) in FIB and SEM
Activation energy of diffusion
Activation energy for electromigration (EM)
Advanced EM-related measurements and analyses: challenges
Advanced/latest transmission electron microscopes (TEMs/STEMs)
Thin TEM sample to avoid multiple/plural scattering
EM improvements for reducing beam damage
Advanced/atomic/high resolution/latest SEMs
Advantages & disadvantages
Advantages of EMs with aberration correctors
Advantages and disadvantages of FIB technology for EM sample preparations
Advantages and disadvantages of low-/high-voltage TEM and STEM
Advantages and disadvantages of TEM-related techniques
Air
Pressurized air for EM parts
Airlocks
Aircraft and aerospace industry
Airy disc
Achromatic configurations/lenses/achromats
Achromatic-aplanatic lenses in EMs
Actuators
Achromaticity correction in EFTEM
Aging in ferroelectrics
Agglomerations
Agglomeration in titanium silicide films
Alignment in EMs
Gun-alignment/adjustment and its coil control system
Aberration in well-aligned EMs
Alignment of objective lens axis
Spherical aberration affected by beam alignments
Chromatic aberration affected by beam alignments
Spatial resolution/resolving power affected by beam alignments
Beam alignment between condenser and objective lenses
Alkali metals
Alkali metals in Periodic table
EELS of alkali metals
Alkaline hydroxide
Allowed reflections/diffraction of common crystal structures
Alloy
Electromigration resistance induced by alloying
Gibbs free energy change due to alloy formation
Shape memory alloys
Alloy liquid metal ion sources for advanced FIBs
Aluminum
EELS measurement of aluminum
EDS measurements of Al
Aluminides
AlGaInP
AlGaAs
AlN
AlAs
AlP
AlCl
3
Al–X phase diagrams
Al
x
W
y
Ca
3
Al
2
Si
3
O
12
Spinel (MgAl
2
O
4
)
Carbon-coated aluminum
Special application of Al material in EM-related devices
Aluminum-lithium (Al-Li) based alloys
EFTEM imaging of aluminum
Atomic-number contrast of aluminum ions
Al/Ti/W/TiN stack used for VLSI
LaAlO
3
Zr
x
–Nb
y
–Cu
z
–Ni
m
–Al
n
alloys
Compound semiconductor
XPS of aluminum and its related materials
Aluminum applied in EM systems
Al-based metallic-glass alloys
Alumina (Al
2
O
3
)
Alpha (α)-alumina
Gamma (γ)-alumina
Aluminum in ICs
Aluminum alloys for interconnections in ICs
Al-Cu alloy
Amorphous materials
Diffractogram intensity of thin amorphous TEM specimen
Analysis of amorphous materials
Thon rings in bright-filed imaging
Fourier transform and FFT of HRTEM image of amorphous materials
Kikuchi pattern contrast of EBSD depending on amorphous layer on surface
Ronchigrams of amorphous films
TEM analysis of defects in amorphous materials
XRD patterns of amorphous materials
TEM analysis of short range ordering in amorphous materials
HRTEM images & electron diffraction of amorphous metallic glasses
Analysis of interatomic spacing of amorphous materials using electron diffraction
Analysis of free volume of amorphous materials using electron diffraction
Free volume change in amorphous materials induced by deformation
Effect of amorphous layer on contrast of HRSEM images
Effects of amorphous layer and specimen thickness on high resolution STEM images
Crystallization kinetics of amorphous materials
Difference of binding energies in amorphous and crystalline phases
Tetrahedral structure in amorphous materials
HAADF-STEM images of amorphous metallic glasses
Difference between bond lengths of amorphous and crystalline materials
Amorphization methods for alloys
Amorphization of materials due to FIB deposition
Amorphous layer formed during EM sample preparation using Ar milling
Amorphous layer formed during EM sample preparation using FIB
Amorphous materials: amorphous alloys
Amorphous Cu
x
Zr
y
alloys
Ammonium fluorosilicate [(NH
4
)
2
SiF
6
]
Ampère-Maxwell law
Amplify
Secondary electron detecting/amplifying system in EMs
Amplitude & intensity of scattered wave by atoms
Analog-to-digital (A/D) converter
Amplitudes of HRTEM image
Analytical electron microscopy (STEM/TEM)
Periodic table for analytical TEM (EDS/EELS) analysis
Electron energy-loss spectroscopy (EELS)
Eenergy dispersive x-ray spectroscopy (EDS)
Convergent beam electron diffraction (CBED)
Cathodoluminescence
Auger electron spectroscopy (AES)
Electron beam induced current (EBIC)
Angles
Conversion between reciprocal space vector and angle
Angle between two planes/plane normals/poles measured by Wulff net
Angle between normals to planes/in electron diffraction pattern
Interfacial angles of cubic crystals
Cell angles in unit cells in crystals
TEM experimental determination of lattice parameters
Accuracy of angle measurement in HRTEM images
Angle between directions
Angle between polarization vectors of adjacent domains in various crystalline phases in ferroelectrics
Angles in SEM
Angular distribution of secondary electrons
Angular distribution/emission angle of secondary electron in SEM
Angular/polar distribution of X-ray generation in electron microscopy
Angular
Transmitted angular-resolved electron scattering distribution
Angular spread of incident electrons
Angular distribution of signal/information from TEM measurements
Angular dependence of milling in FIB
Angular dependence of elastic scattering of electrons
Angular dependence of inelastic scattering of electrons
Angular distribution of inelastically scattered electrons
Anode (A1/A2) in electron gun in EMs
Anode wobbler in TEM
Anode (negative) & cathode (positive) electrode materials for lithium batteries
Anisotropy
Anisotropy of thermal expansion coefficients due to defects
Anisotropy of physical and chemical properties of crystals
Anisotropic wet-etching
Annealing
Nitrogen atmosphere for annealing for semiconductors
Structural relaxation of metallic glasses at elevated temperatures
Free volume change of metallic glasses at elevated temperatures
Defects in crystals formed by ion-implantation and annealing
Dependence of crystallized fraction on annealing time and temperature
Antiferroelectrics & Antiferroelectric materials
Annular bright-field measurements
Anti-reflective layer in EDS detector
Antibonding
Antimony (Sb)
(HAADF) STEM images of antimony (Sb)
Atomic-number contrast of antimony ions
Misfit layer chalcogenides: (AX)
1+δ
(BX
2
)
n
(A = rare earth/Sn/Pb/Sb/Bi; B = Ti/V/Cr/Nb/Ta; X = S/Se)
Ge
x
Sb
y
Te
z
(GST)
Sb-X phase diagrams
Aperiodic crystals
Aplanatic lenses/aplanatic points/aplanatic conditions/aplanats
Apertures
Apertures in GIF camera
Aperture effect/function of lens
First aperture in electron gun for filtering electrons
Numerical aperture
Objective apertures in TEMs
Condenser aperture in EMs
Stray aperture in EMs
ADF-TEM (annular dark-field transmission electron microscopy) aperture
Aperture function
Selected area diffraction (SAD) aperture
Contamination of apertures
Optimal size of virtual objective apertures in STEM and SEM
Differential pumping aperture (DPA) in EMs
Beam-defining aperture
EELS signal/intensity affected by collection & convergence angles & apertures
Condenser 1 (C1) and condenser 2 (C2) lens/apertures
Spray & beam defining apertures in FIB
Collection angles/apertures of EELS (Basics)
Problems/damage of apertures
High contrast aperture in TEMs
Artifacts induced by misalignment of condenser aperture
Apple products: iPhone, iPad, & iPod touch, Apple watch & MacBook
Array mask annotation on Gatan DigitalMicrograph
Argon (Ar)
Argon milling for TEM specimen preparation
Ultrathin specimen preparation by low-energy Ar-ion milling
Argon implantation occurring in TEM sample milling process
Amorphous layer formed during EM sample preparation using Ar milling
"Mottling" visible in FIB- and Ar-milled specimens
Milling rate of materials with argon ion polishing
Comparison between FIB and Ar (argon) ion milling specimen preparations
Argon ion sputtering yield in milling
EDS measurement of Argon (Ar)
EELS measurement of Argon (Ar)
ASIC 1/2 pitch (in ICs)
Areal Density (atoms per unit area)
Arrow annotation on DM
Arsenic (As)
Arsenides
AlAs
AlGaAs
GaAs
EELS of Arsenic (As)
InAs
Compound semiconductor
ZnSSe-based/GaAs heterostructures
Astigmatism/stigmators in EMs
Astigmatism correction coil control system in SEMs
Condenser stigmators
Fifth-order 6-fold astigmatism
Difference between axial coma and twofold astigmatism
Twofold astigmatism
Fresnel fringes affected by objective astigmatism
Determination of threefold astigmatism (A
2
) in TEM measurements & its correction
Astigmatism correction in EMs
Field astigmatism in TEMs
Stigmators
Objective stigmator/astigmatism correction
Astigmatism in STEMs
Spatial resolution affected by objective astigmatism
Astigmatism corrections of condenser and objective lenses in TEM for magnetic materials
Correction of astigmatism of condenser lens using caustic image
Astigmatism effect on Fourier transform
Aberration coefficient C
1,2
/A
1
: two-fold axial astigmatism and its corrections in TEMs
Correction of astigmatism of objective lens in TEM using Fresnel fringes
Correction of astigmatism of objective lens in TEM based on diffractogram
Correction of astigmatism of objective lens using caustic image
Correction of objective astigmatism with minimum background contrast technique
Asymmetry
Distortion/asymmetry of X-ray peak from Gaussian shape in EDS
Asymmetric units in unit cells
Asymmetric electron diffraction patterns
Atom
Number of atoms at surface of and in nanoparticles
Number of lattice points (atoms) per unit cell
Atomic packing factor in crystals
Atom column in crystal
Probability of containing m atoms in a single atom column in crystal
Contrast of atoms in TEM
Atomic displacement
Atomic displacement parameter/factor & mean-square atomic displacement
Cross-sections of atom displacement due to electron irradiation in bulk
Displacement energy for bulk and surface diffusion induced by electron irradiation
Displacement energy for atoms in bulk and at sample surface due to electron irradiation
Displacement energy for surface sputtering/knock-on induced by electron irradiation
Elemental (atomic) displacement threshold of chemical elements due to electron irradiation at sample surface
Energy transfer for atomic displacement/knock-on process due to electron irradiation
Elemental (atomic) displacement threshold due to electron irradiation
Elemental (atomic) displacement threshold due to electron irradiation in bulk
Displacement of atoms due to electron irradiation in EMs
Atomic number (Z)
Dependence of inelastical scattering of electrons on atomic number
Dependence of elastic scattering on atomic number
Dependence of thermal diffuse scattering on atomic number
HRTEM analysis of light elements
Atomic & ionic radii and valence states of chemical elements in periodic table
Artifacts
Artifacts in TEM contrast transfer patterns and profiles
Artifact in image or spectrum with high probe current or analyzing on mobile elements
Contrast reversal in EMs
Diffraction effects on EELS intensity
Artifacts in electron holography measurements
Artifact in electron tomography
Artifacts in EFTEM images
EELS artifacts due to misalignment of ZLP
Streaking artefacts in FFTs of TEM images
Artifacts and drawbacks of XRD technique
Streaking artifacts in EELS images or profiles
Artifacts/spurious x-rays in EDS measurements
Inaccuracy/artifacts in electron diffraction and spurious intensities
Artifacts induced by misalignment of condenser aperture
Artifact reduction in EM image recording
Streaking artifact in TEM/STEM images
Artifacts in CBED patterns
EELS artifacts
Atomic
Electron atomic scattering factors
Atomic/high resolution/advanced/latest SEMs
Atomic weight of elements in periodic table
Atomic structure determination by EXELFS
Atomic short-range ordering
Atomic point defects
Atomic arrangement in crystal structures
(Atomic) density of different materials
Atom probe tomography (APT)
Comparison among TEM, APT,ToF SIMS and ICP-MS
Atmospheric thin window (ATW) EDS detector
Attenuation of light
Attenuation of AES (Auger Electron Spectroscopy) electrons
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Auger electron spectroscopy (AES)
Electron relaxation and Auger electron generation
Comparison between EDS and AES
Mean free path of Auger electrons
Responding time of Auger electron emission for electron irradiation
Auger detection in EMs
Comparison between EELS and AES
AES transitions
Yield of Auger electrons
Autofocus methods in TEM imaging
Automotive hardware
Average energy loss/mean energy loss per inelastic electron collision
Automatic functions
Automatic qualitative EDS analysis
Axial/axis
Effects of axial illumination conditions in TEM system
Axial coma aberration in EMs
Accuracies of beam tilt & of alignment of zone axis
Azimuthal and radial circles/Ronchigram in STEM